When you compare them side-by-side, traditional CMP pads fall far short of NexPlanar’s Element pads.
| Old, Traditional CMP Pads | NexPlanar CMP Pads | |
|---|---|---|
| Pad fabrication | Sliced from large, hard cylinders | Proprietary, single-pad molding process |
| Groove fabrication | Grooves cut into pad leaving sharp edges that scratch wafers | Grooves molded into pad for smoother, consistent edges |
| Pad hardness | Mostly hard pads Limited soft pad choices |
Full spectrum of ultra-soft to hard pads for any application |
| Pore sizes | Limited choices | Fully customizable |
| Pad compressibility | Limited choices | Fully customizable |
| Groove profiles | Limited choices | Proprietary in-situ groove design ensures uniform, high integrity wall profiles that provide better slurry distribution |
| Pad customization | Limited custom pads Limited flexibility Limited pad optimization Limited discussions |
Customize pad with hardness, pore sizes, compressibility and groove profile optimized for each CMP application |
| CMP pad life | Shorter pad life results in more downtime and lower yields per pad | Longer pad life, less downtime and higher yields per pad |
| Cost of ownership | Lower yields, higher costs | Higher yields, lowest costs |
© Copyright 2012 Nexplanar Inc. | All Rights Reserved. | Element is a trademark of NexPlanar.