NexPlanar's Element™ family of hybrid polymer pads provide a full spectrum of hardness, pore sizes and groove patterns.
| Product | Application | Groove Patterns |
|---|---|---|
| Element 7000 series | STI, Ox, W, Cu Bulk | S, SXR, A, E |
| Element 8000 series | STI, W, Ox | S, SXR, A, E |
| Element 9000 series | Barrier, Special | S, SXR, A, E |
| Element 9000 series | Aluminum | S, SXR, A, E |
Element 7000 and 8000 pads are hard and mid-hard pads that have a hybrid polymer matrix, smaller pore sizes, in-situ grooves and a proprietary lubricant that provides a low coefficient of friction.
NexPlanar Element 9000 pads use our proprietary urethane formulations and are the only pads in the industry to deliver the softness required for many of the newest and most demanding CMP applications. Like all NexPlanar pads, they are molded individually with in-situ grooves that eliminate the need to cut the pads and destroy their soft polishing properties.
© Copyright 2012 Nexplanar Inc. | All Rights Reserved. | Element is a trademark of NexPlanar.